The vacuum sensor is a high-precision pressure sensor designed for semiconductor manufacturing processes, analytical instruments, and industrial vacuum systems.

It supports a wide measurement range from ultra-high vacuum levels below 1 Torr up to 1,000 Torr, delivering stable and repeatable performance across various vacuum conditions. With high accuracy of ±0.25% of reading (±0.5% for below 1 Torr), the sensor enables precise process control, contributing to improved quality and operational stability in semiconductor manufacturing.

Featuring analog output, the sensor can be easily integrated into various systems, while maintaining reliable performance under temperature variations. Its robust design ensures high durability and resistance to pressure, allowing stable operation even in demanding industrial environments.

Optimized for semiconductor and advanced industrial applications, this sensor provides a reliable solution for precise vacuum measurement in critical processes.