VITA 12” is a vertical chamber RIE system that is effective for the removal of various materials.

 

Key Features:

• Vertical Chamber (Electrode Size: 14.4 inch)
• Single Block Aluminum Chamber / Uniform gas diffusing
• Uniform Gas Flow Design ( Patent No. 10-1701381 )
• RF Generator (Frequency: 13.56MHz / Power: 600W)
• Manual & Fully Automatic operation software

 

Applications:

• Semiconductor Research
• Polymer Etching
• 2D Materials
• Micro-electromechanical Systems
• Bio & Life science

Chemical & Material Engineering